Handbook of Silicon Semiconductor Metrology by Alain C. Diebold (English) Hardco

Description: Handbook of Silicon Semiconductor Metrology by Alain C. Diebold Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose. FORMAT Hardcover LANGUAGE English CONDITION Brand New Publisher Description A description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods. Author Biography Alain C. Diebold Table of Contents Introduction - silicon semiconductor metrology. Part 1 Transistor fabrication metrology: gate dielectric metrology; metrology for ion implantation; MOS device characterization; carrier illumination characterization of ultra-shallow implants;modelling of statistical manufacturing sensitivity and of process control and metrology requirements for a 0.18Mum NMOSFET. Part 2 On-chip interconnect metrology: overview of metrology for on-chip interconnect; metrology for on-chip interconnectdielectrics; thin film metrology using impulsive stimulated thermal scattering (ISTS); metal interconnect process control using picosecond ultrasonics; sheet resistance measurements of interconnect films; characterization of low dielectric constantmaterials; high resolution profilometry for CMP and etch metrology. Part 3 Lithography metrology: critical dimension metrology in the scanning electron microscope; scanned probe microscope dimensional metrology; electrical DC metrology and relatedreference materials; metrology of image placement; scatterometry for semiconductor metrology. Part 4 Defect detection and characterization: unpatterned wafer defect detection; particle and defect characterization; calibration of particle detectionsystems. Part 5 Sensor based metrology: in-situ metrology. Part 6 Data management: metrology data management and information systems. Part 7 Electrical measurement based statistical metrology: statistical metrology. Part 8 Overviews of key measurement andcalibration technology: physics of optical metrology of silicon based semiconductor devices; UV, VUV and extreme UV spectroscopic reflectometry and ellipsometry; analysis of thin layer structures by x-ray reflectometry; ion beam methods; electronmicroscopy based measurement of feature thickness and calibration of reference materials; status of lithography at the end of 2000. Review "recommended for special libraries and academic libraries serving graduate level programs in these areas." - E-Streams "a cornerstone reference source.uniquely ample and thorough." -Semiconductor International "a formative instrument. contains valuable and very new information.an instructive and valuable book." -IASI Polytechnic Magazine Promo Copy Details ISBN0824705068 Author Alain C. Diebold Short Title HANDBK OF SILICON SEMICONDUCTO Language English ISBN-10 0824705068 ISBN-13 9780824705060 Media Book Format Hardcover Illustrations Yes Year 2001 Country of Publication United States Edited by Alain C. Diebold Edition 1st Affiliation Sematech, Austin, Texas, USA DOI 10.1604/9780824705060 UK Release Date 2001-06-29 AU Release Date 2001-06-29 NZ Release Date 2001-06-29 US Release Date 2001-06-29 Imprint CRC Press Inc Place of Publication Bosa Roca Pages 894 Publisher Taylor & Francis Inc Publication Date 2001-06-29 Alternative 9780367397166 DEWEY 621.38152 Audience Professional & Vocational We've got this At The Nile, if you're looking for it, we've got it. With fast shipping, low prices, friendly service and well over a million items - you're bound to find what you want, at a price you'll love! TheNile_Item_ID:161191309;

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